Maarten P. de Boer-Mechanical Engineering - Carnegie Mellon University

Maarten P. de Boer

Associate Professor, Mechanical Engineering

Address:
Carnegie Mellon University
Department of Mechanical Engineering
5000 Forbes Avenue
Scaife Hall 417
Pittsburgh, PA 15213
Phone: 412-268-8752
Fax: 412-268-3348
Email: mpdebo@andrew.cmu.edu

Bio

Our group works in the areas of micro- and nanomechanics, with an emphasis on mechanics of materials.  Our objectives are to develop ultra-reliable technologies and to explore new device concepts and test methods.  We design micro- and nanomechanical structures using computer-aided software packages, and we analyze them with analytical and computer-based methods such as finite element analysis.  We fabricate devices using lithography-based clean room methods, and we test them with many techniques including scanning probe, optical and electron microscopies, interferometry, velocimetry, nanoindentation and surface analysis methods such as Auger and X-ray photoelectron spectroscopy.  Testing is done in controlled atmospheres with ambient pressure ranging from atmospheric to ultra-high vacuum.  Emphasis is placed on building models developed with insight from experimental results.


Current projects include (1) MEMS in-situ tensile testing with application to confocal Raman microscopy and electron backscatter diffraction (in collaboration with NIST and Sandia Labs researchers), (2) microrelay reliability, (3) capillary adhesion, (4) friction of multi-asperity surfaces and (5) imaging of biological materials by scanning probe microscopy.


If you are interested in joining my group for a PhD degree, please apply directly to the Carnegie Mellon University Mechanical Engineering Department.

Education

B.S.E.E. 1981, Cornell

M.S.E.E. 1982, University of Colorado, Boulder

Ph.D. (Mat. Sci.) 1996, University of Minnesota

Selected Publications

  1. F. W. DelRio, M. L. Dunn and M. P. de Boer, "Van der Waals and capillary adhesion of polycrystalline silicon micromachined surfaces", submitted (2010).
  2. M. Naraghi, T. Ozkan, I. Chasiotis, S. S. Hazra, and M. P. de Boer, "On-chip nanomechanical experiments with strong and ductile fibers", Journal of Micromechanics and Microengineering, accepted (2010). 
  3. S. S. Hazra, M. S. Baker, J. L. Beuth, and M. P. de Boer, "Compact on-chip microtensile tester with prehensile grip mechanism", submitted (2010).
  4. G. Subhash, A. D. Corwin and M. P. de Boer, "Evolution of wear characteristics and frictional behavior in MEMS devices", Tribology Letters, in press (2010).
  5. D. B. Asay, M. P. de Boer and S.H. Kim, "Equilibrium vapor adsorption and capillary force: exact Young-Laplace equation solution and circular approximation approaches", Journal of Adhesion Science and Technology,  in press (to appear in 2011).
  6. M. P. de Boer, R. C. Anderson, R. J. Shul, P. J. Clews and M. S. Baker, "Wafer-level singulation, release and post-processing in surface micromachining", Journal of Micromechanics and Microengineering, 20 075007 (8pp) (2010).
  7. A. D. Corwin and M. P. de Boer, Frictional aging, de-aging and re-aging in a micromachined interface, Physical Review B  81 174109 (2010). 
  8. D. S. Grierson, A. R. Konicek, G. E. Wabiszewski , A. V. Sumant, M. P. de Boer, A. D. Corwin, and R. W. Carpick, "Characterization of microscale wear in a polysilicon-based MEMS device using AFM and PEEM-NEXAFS spectromicroscopy",  Tribology Letters 36 (3) 233-238 (2009).
  9. E. G. Herbert, W. C. Oliver, M. P. de Boer and G. M. Pharr, Measuring the elastic modulus and residual stress of free-standing thin films using nanoindentation techniques, J. Mater. Res.24 (9) 2974-2985 (2009). 
  10. S. S. Hazra, M. S. Baker, J. L. Beuth and M. P. de Boer, "Demonstration of a high-throughput on-chip tensile tester," J. Micromech. and Microeng., 19 082001 (5 pp) (2009). 
  11. D. A. Czaplewski, G. A. Patrizi, G. M. Kraus, J. R. Wendt, C. D. Nordquist, S. L. Wolfley, M. S. Baker and M. P. de Boer, "Nanomechanical switch for integration with CMOS logic", J. Micromech. and Microeng., 19 085003 (12 pp.) (2009). 
  12. A. D. Corwin and M. P. de Boer, Frictional aging and sliding bifurcation in monolayer-coated micromachines, J. Microelectromechanical Systems, 18 (2) 250-262 (2009).
  13. A.D. Corwin and M. P. de Boer, A linearized method to measure dynamic friction of micromachined devices, Exp. Mech., 49 395-401 (2009).
  14. F. W. DelRio, M. L. Dunn, and M. P. de Boer, Capillary adhesion model for contacting micromachined surfaces, Scripta Mat. 59 (9) 916-920 (2008).
  15. M. P. de Boer, M. S Baker and F. W. DelRio, On-chip laboratory kit for free-standing metal film mechanical property testing, Part I - theory, Acta Mater., 56 (14) 3344 (2008).
  16. M. P. de Boer, A. D. Corwin, P. G. Kotula, J. R. Michael and M. J. Shaw., On-chip laboratory kit for free-standing metal film mechanical property testing, Part II- experiments, Acta Mater., 56 (14) 3353 (2008).
  17. P. C. T.de Boer and M. P. de Boer, Rupture Work of Pendular Bridges, Langmuir 24 (1) 160 (2008). 
  18. M.P. de Boer and P.C.T. de Boer, "Thermodynamics of capillary adhesion between rough surfaces," Journal of Colloid and Interface Science, 311, 171-185 (2007).
  19. F.W. Delrio, M.L. Dunn, L.M. Phinney, C.J. Bourdon, and M.P. de Boer, "Rough surface adhesion in the presence of capillary condensation," Applied Physics Letters, 90 (16), 163104 (2007). 
  20. M.P. de Boer, "Capillary adhesion between elastically hard rough surfaces," Experimental Mechanics, 47 (1), 171 (2007). 
  21. F.W. DelRio, M.L. Dunn, and M.P. de Boer, "Growth of silicon carbide nanoparticles using tetraethylorthosilicate for microelectromechanical systems," Electrochemical and Solid-State Letters, 10 (1), H27-H30 (2007).
  22. S.J. Koch, G.E. Thayer, A.D. Corwin, and M.P. de Boer, "Micromachined piconewton force sensor for biophysics investigations," Applied Physics Letters, 89, 173901 (2006). 
  23. F.W. DelRio, M.L. Dunn, B.L. Boyce, A.D. Corwin and M.P. de Boer, "The effect of nanoparticles on MEMS adhesion," Journal of Applied Physics, 99, 104304 (2006).
  24. E.E. Flater, A.D. Corwin, M.P. de Boer, and R.W. Carpick, "In-situ wear studies of surface micromachined interfaces subject to controlled loading," Wear, 260 (6), 580 (2006).
  25. M.B. Sinclair, M.P. de Boer and A.D. Corwin, "Long Working-Distance, Incoherent Light Interference Microscope," Applied Optics, 44 (36), 7714 (2005) (cover article).
  26. F. W. DelRio, M.P. de Boer, J.A. Knapp, E.D. Reedy, P.J. Clews, and M L. Dunn, "Role of dispersion forces in adhesion of micromachined surfaces," Nature Materials, 4 (8), 629 (2005).
  27. A.D. Corwin and M.P. de Boer, "Effect of adhesion on dynamic and static friction in surface micromachining," Applied Physics Letters, 84 (13), 2451 (2004).
  28. M.P. de Boer, D.L. Luck, W.R. Ashurst, A.D. Corwin, J.A. Walraven, and J.M. Redmond, "High-performance surface-micromachined inchworm actuator," Journal of Microelectromechanical Systems, 13 (1), 63 (2004).
  29. W.R. Ashurst, M.P. de Boer, C. Carraro, and R. Maboudian, "An investigation of sidewall adhesion in MEMS," Applied Surface Science, 212-213, 735 (2003).
  30. J.A. Knapp and M.P. de Boer, "Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces," Journal of Microelectromechanical Systems, 11 (6), 754 (2002).
  31. M.S. Baker, M.P. de Boer, N.F. Smith, L.K. Warne, and M.B. Sinclair, "Integrated measurement-modeling approaches for evaluating residual stress using micromachined fixed-fixed beams," Journal of Microelectromechanical Systems, 11 (6), 743 (2002).
  32. B.D. Jensen, M.P. de Boer, N.D. Masters, F. Bitsie, and D.A. LaVan, "Interferometry of actuated cantilevers to determine material properties and test structure non-idealities in MEMS," Journal of Microelectromechanical Systems, 10 (3), 336 (2001).
  33. M.P. de Boer and T.M. Mayer, "Tribology of MEMS," Materials Research Society Bulletin, 26 (4), 302 (2001).
  34. J.G. Kushmerick, M.G Hankins, M.P. de Boer, P.J. Clews, R.W. Carpick, and B.C. Bunker, "The influence of coating structure on micromachine stiction," Tribolology Letters, 10 (1-2), 103 (2001).
  35. M.P. de Boer, J.A. Knapp, T.A. Michalske, U. Srinivasan, and R. Maboudian, "Adhesion hysteresis of silane coated microcantilevers," Acta Materialia, 48 (18-19), 4531 (2000).
  36. B.C. Bunker, R.W. Carpick, R. Assink, M.L. Thomas, M.G. Hankins, J.A. Voigt, D.L. Sipola, M.P. de Boer, and G.L. Gulley, "The impact of solution agglomeration on the deposition of self-assembled monolayers," Langmuir, 16, 7742 (2000).
  37. T.M. Mayer, M.P. de Boer, N.D. Shinn, P.J. Clews, and T.A. Michalske, "Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems," Journal of Vacuum Science and Technology B, 18 (5), 2433 (2000).
  38. J.J. Sniegowski and M.P. de Boer, "IC-compatible polysilicon surface micromachining," Annual Review of Materials Science, 30, 297 (2000).
  39. M.P. de Boer and T.A. Michalske, "Accurate method for determining adhesion of cantilever beams," Journal of Applied Physics, 86 (2) 817, (1999).
  40. M.P. de Boer, J.C. Nelson, and W.W. Gerberich, "Thin film scratch testing in two dimensions-experiments and analysis," Journal of Materials Research, 13 (4), 1002 (1998).
  41. M.P. de Boer, M. Kriese, and W.W. Gerberich, "Investigation of a new fracture mechanics specimen for thin film adhesion measurement," Journal of Materials Research, 12 (10) 2673 (1997).
  42. M.P. de Boer and W.W. Gerberich, "Microwedge indentation of the thin film fine line-1: Mechanics," Acta Materialia, 44 (8), 3169 (1996).
  43. M.P. de Boer and W.W. Gerberich, "Microwedge indentation of the thin film fine line-2: Experiment," Acta Materialia, 44 (8), 3177 (1996).
  44. M.P. de Boer and S. Geller, "Low-temperature phases of the solid electrolyte Ag26I18W4O16," Journal of Solid State Chemistry, 48 (1), 121 (1983).