Carnegie Mellon Nanofabrication Facility
The TPES lab has access to the extensive array of the fabrication equipment in the Nanofab. The equipment housed in the facility's 3,800 square feet of clean room space includes an electron beam lithography system, fourteen sputtering systems, ion beam etching and deposition systems, a wafer stepper, three contact aligners, a FIB, a CMP and two RIEs. For more information, visit the Nanofab website http://www.nanofab.ece.cmu.edu.
Central Electron Microscopy Facilities
The Department of Material Science & Engineering at Carnegie Mellon maintains this facility. The seven electron microscopes include two scanning electron microscopes, four transimission electron microscopes, and one focus ion beam scanning microscope. For more information, see the following link: http://neon.mems.cmu.edu/fac/emf.html.
PPG Industries Colloids, Polymers, and Surfaces (CPS) Laboratory Facilities
The CPS facilities in the Center for Complex Fluids Engineering contains a wide array of equipment for colloid, polymer, and surface characterization. A list of some of the equipment can be found on the CPS website: http://cfe.cheme.cmu.edu/labs-cps.htm.
Carnegie Mellon MEMs Laboratory
The MEMs lab features equipment for the fabrication and characterization of microelectromechanical systems (MEMs). For more information see the MEMs lab's webpage: http://www.ece.cmu.edu/~mems/.
Mechanical Engineering Wet Lab
The department's shared wet lab space contains equipment for spin coating and soft lithography with PDMS.