Material and surface characterization
| In exploratory CMP projects, post processing of polished surfaces is the most important step. Experimental parametric studies can be used to provide insight into the mechanism, and allow us to choose the most economical solution to an industrial problem. For example, to identify the suitability different slurries for specific processes, or to characterize the effect of heat treatment on to-be-polished samples, post processing of polished samples is necessary.
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